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    Title :

    Inexpensive, quickly producable X-ray mask for LIGA


    Contributors:
    Harris, C. (author) / Desta, Y. (author) / Kelly, K. W. (author) / Calderon, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 4 ; 189-193


    Publication date :

    1999-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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