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    Title :

    Materials of LIGA technolgy


    Contributors:
    Ehrfeld, W. (author) / Hessel, V. (author) / Loewe, H. (author) / Schulz, C. (author) / Weber, L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 5 , 3 ; 105-112


    Publication date :

    1999-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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