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    Title :

    Equations of exposure time and X-ray mask absorber thickness in the LIGA process


    Contributors:
    Gil, K. H. (author) / Lee, S. S. (author) / Youm, Y. (author)

    Published in:

    Publication date :

    2001-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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