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    Title :

    Microfabrication of polytetrafluoroethylene using SR direct etching



    Published in:

    Publication date :

    2012



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    Unknown



    Classification :

    Local classification TIB:    770/5600/8000
    BKL:    53.00 Elektrotechnik: Allgemeines / 53.31 Elektrische Energieübertragung / 52.53 / 53.00 / 53.33 / 53.31 / 53.33 Elektrische Maschinen und Antriebe / 52.53 Kraftwerkstechnik




    Laser-assisted wet chemical etching of metals for microfabrication [2207-80]

    Nowak, R. / Metev, S. / Sepold, G. et al. | British Library Conference Proceedings | 1994


    The pickup of ion beam etching depth information during microfabrication [5253-103]

    Zhao, G. / Wang, Y. / SPIE - The International Society for Optical Engineering | British Library Conference Proceedings | 2003



    POLYTETRAFLUOROETHYLENE

    SAE Technical Papers | 1957