Microfabrication of polytetrafluoroethylene using SR direct etching
Electrical engineering in Japan ; 178 , 4
2012
Article (Journal)
Unknown
Magnetron Plasma Etching of SiC for Microfabrication
Online Contents | 1998
Laser-assisted wet chemical etching of metals for microfabrication [2207-80]
British Library Conference Proceedings | 1994
|The pickup of ion beam etching depth information during microfabrication [5253-103]
British Library Conference Proceedings | 2003
|SAE Technical Papers | 1957