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    Title :

    Magnetron Plasma Etching of SiC for Microfabrication


    Published in:

    Publication date :

    1998



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    BKL:    50.00 Technik allgemein: Allgemeines / 50.00 / 55.60 Raumfahrttechnik / 55.60




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