High aspect ratio micromachining by synchrotron radiation direct photo-etching
MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 135-138
1998-01-01
4 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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NTIS | 1988
|NTRS | 1988
|British Library Conference Proceedings | 2004