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    Title :

    Design and fabrication of a resonant scanning micromirror suspended by V shaped beams with vertical electrostatic comb drives


    Contributors:
    Li, X. Y. (author) / Jin, Q. (author) / Qiao, D. Y. (author) / Kang, B. P. (author) / Yan, B. (author) / Liu, Y. B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 3 ; 295-302


    Publication date :

    2012-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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