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    Title :

    Rotary electrostatic micromirror switches using wafer-scale processing and assembly


    Contributors:
    Tu, C. C. (author) / Fanchiang, K. (author) / Liu, C. H. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 12 ; 1099-1108


    Publication date :

    2006-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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