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    Title :

    Dynamic response of a torsional micromirror to electrostatic force and mechanical shock


    Contributors:
    Khatami, F. (author) / Rezazadeh, G. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 4 ; 535-545


    Publication date :

    2009-01-01


    Size :

    11 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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