Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Study of an eletrostatically actuated torsional micromirror with compliant planar springs


    Contributors:
    You, J. (author) / Packirisamy, M. (author) / Stiharu, I. (author)

    Published in:

    Publication date :

    2008-01-01


    Size :

    10 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Analysis of a split-bar torsional micromirror characteristics

    Ravindrababu, A. / Archana, M.S. / Amur, R. et al. | IEEE | 2002


    A High Speed Electrostatically Actuated Al-MEMS Micromirror Array

    Mathias, Adam / Fox, Jon / Temmen, Mark et al. | AIAA | 2011


    INDIVIDUAL ACTIVE TORSIONAL SPRINGS

    RUEMELIN JACOB M / RICKETTS BRANDON E | European Patent Office | 2021

    Free access

    A study on the coupled dynamic characteristics for a torsional micromirror

    Zhao, J. P. / Chen, H. L. | British Library Online Contents | 2005


    Individual active torsional springs

    RUEMELIN JACOB M / RICKETTS BRANDON E | European Patent Office | 2022

    Free access