Study of an eletrostatically actuated torsional micromirror with compliant planar springs
MICROSYSTEM TECHNOLOGIES ; 14 , 1 ; 7-16
01.01.2008
10 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
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A study on the coupled dynamic characteristics for a torsional micromirror
British Library Online Contents | 2005
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