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    Titel :

    A High Speed Electrostatically Actuated Al-MEMS Micromirror Array


    Beteiligte:
    Mathias, Adam (Autor:in) / Fox, Jon (Autor:in) / Temmen, Mark (Autor:in) / Tuck, Eric (Autor:in)

    Kongress:

    Infotech@Aerospace 2011



    Erscheinungsdatum :

    01.01.2011




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Elektronische Ressource


    Sprache :

    Englisch




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