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    Titel :

    A High Speed Electrostatically Actuated Al-MEMS Micromirror Array



    Kongress:

    AIAA Infotech@Aerospace conference ; 2011 ; St. Louis, MO



    Erscheinungsdatum :

    01.01.2011


    Format / Umfang :

    12 pages


    Anmerkungen:

    Includes bibliographical references and index



    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




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