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    Title :

    A High Speed Electrostatically Actuated Al-MEMS Micromirror Array



    Conference:

    AIAA Infotech@Aerospace conference ; 2011 ; St. Louis, MO



    Publication date :

    2011-01-01


    Size :

    12 pages


    Remarks:

    Includes bibliographical references and index



    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




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