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    Title :

    Experimental measurements and behavioral modeling of an electrostatically actuated bi-axial micromirror


    Contributors:
    Parrain, F. (author) / Megherbi, S. (author) / Raynaud, G. (author) / Mathias, H. (author) / Gilles, J. P. (author) / Bosseboeuf, A. (author) / Schröpfer, G. (author) / Faure, N. (author) / Cusin, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 12 , 1-2 ; 8-14


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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