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    Title :

    A High Speed Electrostatically Actuated Al-MEMS Micromirror Array


    Contributors:
    Mathias, Adam (author) / Fox, Jon (author) / Temmen, Mark (author) / Tuck, Eric (author)

    Conference:

    Infotech@Aerospace 2011



    Publication date :

    2011-01-01




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English




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