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    Title :

    Fabrication and dynamic analysis of the electrostatically actuated MEMS variable capacitor


    Contributors:
    Fang, D. M. (author) / Jing, X. M. (author) / Wang, P. H. (author) / Zhou, Y. (author) / Zhao, X. L. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 3 ; 397-402


    Publication date :

    2008-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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