We present the analysis of a torsional micromirror for use in optical switching applications. The pull-in characteristics and the resonant frequency variations of our proposed split-bar design show an improved performance.
Analysis of a split-bar torsional micromirror characteristics
The 15th Annual Meeting of the IEEE Lasers and Electro-Optics Society ; 2 ; 667-668 vol.2
01.01.2002
113695 byte
Aufsatz (Konferenz)
Elektronische Ressource
Englisch
ThE5 Analysis of a Split-Bar Torsional Micromirror Characteristics
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