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    Title :

    Modeling of an electrostatic torsional micromirror for laser projection system


    Contributors:
    Marchetti, E. (author) / Volpi, E. (author) / Battini, F. (author) / Bacciarelli, L. (author) / Fanucci, L. (author) / Hofmann, U. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 16 , 7 ; 1073-1079


    Publication date :

    2010-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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