Modeling of an electrostatic torsional micromirror for laser projection system
MICROSYSTEM TECHNOLOGIES ; 16 , 7 ; 1073-1079
2010-01-01
7 pages
Article (Journal)
English
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Dynamic response of a torsional micromirror to electrostatic force and mechanical shock
British Library Online Contents | 2009
|ThE5 Analysis of a Split-Bar Torsional Micromirror Characteristics
British Library Conference Proceedings | 2002
|A study on the coupled dynamic characteristics for a torsional micromirror
British Library Online Contents | 2005
|Study of an eletrostatically actuated torsional micromirror with compliant planar springs
British Library Online Contents | 2008
|