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    Title :

    A review of fabrication processes for vertical comb drives


    Contributors:
    Gallagher, E. (author) / Moussa, W. (author) / McDermott, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 4 ; 381-397


    Publication date :

    2012-01-01


    Size :

    17 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




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