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    Title :

    Fabrication of metallic micromirror using electroplating technology


    Contributors:
    Li, J. d. (author) / Zhang, P. (author) / Wu, Y. h. (author) / Liu, Y. s. (author) / Xuan, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 17 , 10-11 ; 1671-1674


    Publication date :

    2011-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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