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    Title :

    A Si stencil mask for deep X-ray lithography fabricated by MEMS technology


    Contributors:
    Mekaru, H. (author) / Takano, T. (author) / Ukita, Y. (author) / Utsumi, Y. (author) / Takahashi, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 14 , 9-11 ; 1335-1342


    Publication date :

    2008-01-01


    Size :

    8 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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