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    Title :

    Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology


    Contributors:
    Coane, P. (author) / Giasolli, R. (author) / Ledger, S. (author) / Lian, K. (author) / Ling, Z. (author) / Gottert, J. (author)

    Published in:

    Publication date :

    2000-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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