Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Deep X-ray lithography using mask with integrated electrothermal actuator


    Contributors:
    Lee, K.-C. (author) / Lee, S. S. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 358-364


    Publication date :

    2005-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83




    Fabrication of intermediate mask for deep x-ray lithography

    Sheu, J. T. / Chiang, M. H. / Su, S. | British Library Online Contents | 1998


    High precision, low cost mask for deep x-ray lithography

    Shew, B.-Y. / Cheng, Y. / Shih, W.-P. et al. | British Library Online Contents | 1998


    Parallel-beams/lever electrothermal out-of-plane actuator

    Deladi, S. / Krijnen, G. / Elwenspoek, M. C. | British Library Online Contents | 2004


    Fabrication of HARM structures by deep-X-ray lithography using graphite mask technology

    Coane, P. / Giasolli, R. / Ledger, S. et al. | British Library Online Contents | 2000