Access

    Access via TIB

    Check availability in my library

    Order at Subito €


    Export, share and cite



    Title :

    Indirectly heated micro-electrothermal actuator with a monolithically integrated displacement sensor


    Contributors:
    Xie, K. (author) / Lai, Y. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 15 , 9 ; 1365-1371


    Publication date :

    2009-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



    Monolithically integrated interferometer for optical displacement measurement [2695-50]

    Hofstetter, D. / Zappe, H. P. / SPIE | British Library Conference Proceedings | 1996


    Optical Displacement Measurement with GaAs/AlGaAs-Based Monolithically Integrated Michelson Interferometers

    Hofstetter, D. / Zappe, H. P. / Daendliker, R. | British Library Online Contents | 1997


    Deep X-ray lithography using mask with integrated electrothermal actuator

    Lee, K.-C. / Lee, S. S. | British Library Online Contents | 2005


    A Generic Monolithically Integrated Micromechanic Optic Sensor (MIMOS)

    IEEE; Lasers and Electro-Optics Society | British Library Conference Proceedings | 1996


    A generic monolithically integrated micromechanic optic sensor (MIMOS)

    Tran, A.T.T.D. / Lee, J.J. / Zhang, K. et al. | IEEE | 1996