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    Title :

    Micro gas bearings fabricated by deep X-ray lithography


    Contributors:
    Kim, D. (author) / Lee, S. (author) / Jin, Y. (author) / Desta, Y. (author) / Bryant, M. D. (author) / Goettert, J. (author)

    Published in:

    Publication date :

    2004-01-01


    Size :

    6 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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