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    Title :

    Micro fluidic control systems in deep etch optical lithography


    Contributors:
    Pye, N. (author) / McCormick, M. (author) / Chowaneitz, E. G. (author) / Harper, M. (author) / Goodwin, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 4 ; 197-200


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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