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    Title :

    Low cost transparent SU-8 membrane mask for deep X-ray lithography


    Contributors:
    Cabrini, S. (author) / Perennes, F. (author) / Marmiroli, B. (author) / Olivo, A. (author) / Carpentiero, A. (author) / Kumar, R. (author) / Candeloro, P. (author) / Fabrizio, E. D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 11 , 4/5 ; 370-373


    Publication date :

    2005-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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