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    Title :

    Process research of high aspect ratio microstructure using SU-8 resist


    Contributors:
    Liu, J. (author) / Cai, B. (author) / Zhu, J. (author) / Ding, G. (author) / Zhao, X. (author) / Yang, C. (author) / Chen, D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 10 , 4 ; 265-268


    Publication date :

    2004-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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