High-aspect-ratio microstructure filling by centrifugal force field modeling
MICROSYSTEM TECHNOLOGIES ; 10 ; 571-577
2004-01-01
7 pages
Article (Journal)
English
DDC: | 629.83 |
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British Library Online Contents | 2006
|Process research of high aspect ratio microstructure using SU-8 resist
British Library Online Contents | 2004
|NTRS | 1988
|Engineering Index Backfile | 1950
|NTIS | 1988
|