High-aspect-ratio microstructure filling by centrifugal force field modeling
MICROSYSTEM TECHNOLOGIES ; 10 ; 571-577
01.01.2004
7 pages
Aufsatz (Zeitschrift)
Englisch
DDC: | 629.83 |
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
British Library Online Contents | 2006
|Process research of high aspect ratio microstructure using SU-8 resist
British Library Online Contents | 2004
|NTRS | 1988
|NTIS | 1988
|Engineering Index Backfile | 1950
|