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    Title :

    SU-8: promising resist for advanced direct LIGA applications for high aspect ratio mechanical microparts


    Contributors:
    Kouba, J. (author) / Engelke, R. (author) / Bednarzik, M. (author) / Ahrens, G. (author) / Scheunemann, H. U. (author) / Gruetzner, G. (author) / Loechel, B. (author) / Miller, H. (author) / Haase, D. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 311-317


    Publication date :

    2007-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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