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    Title :

    Study on fabrication of high aspect ratio MEMS microparts using a compact SR beamline


    Contributors:
    Sugiyama, S. (author) / Zhang, Y. (author) / Hosaka, M. (author) / Ueno, H. (author) / Tabata, O. (author) / Konishi, S. (author) / Maeday, R. (author)

    Published in:

    Publication date :

    1998-01-01


    Size :

    3 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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