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    Title :

    Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist


    Contributors:
    Lorenz, H. (author) / Despont, M. (author) / Vettiger, P. (author) / Renaud, P. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 4 , 3 ; 143-146


    Publication date :

    1998-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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