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    Title :

    Fabrication methods for the manufacture of sapphire microparts


    Contributors:
    Allen, D. M. (author) / Redondo, R. (author) / Dany, M. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 18 , 11 ; 1835-1841


    Publication date :

    2012-01-01


    Size :

    7 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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