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    Title :

    A new removable resist for high aspect ratio applications


    Contributors:
    Schirmer, M. (author) / Perseke, D. (author) / Zena, E. (author) / Schondelmaier, D. (author) / Rudolph, I. (author) / Loechel, B. (author)

    Published in:

    MICROSYSTEM TECHNOLOGIES ; 13 , 3-4 ; 335-338


    Publication date :

    2007-01-01


    Size :

    4 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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