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    Title :

    Comparison of PMMA and SU-8 resist moulds for embossing of PZT to produce high-aspect-ratio microstructures using LIGA process


    Contributors:
    Schneider, A. (author) / Su, B. (author) / Button, T. W. (author) / Singleton, L. (author) / Wilhelmi, O. (author) / Huq, S. E. (author) / Prewett, P. D. (author) / Lawes, R. A. (author)

    Published in:

    Publication date :

    2002-01-01


    Size :

    5 pages



    Type of media :

    Article (Journal)


    Type of material :

    Print


    Language :

    English


    Classification :

    DDC:    629.83



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