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Industriesektor
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The historical evolution of US auto firms in Mexico: two models of local development
Shifting from co-development to co-innovation
Modularity ten years after: an evaluation of the Brazilian experience
The Relationship between Temperature and Levitation Stiffness of YBCO Bulk for Maglev Vehicle
X-ray study of surfaces and interfaces [4449-31]
Effects of particle shape on particle identification and scatter predictions [4449-18]
Polarized light scattering from metallic particles on silicon wafers [4449-39]
Measurement of the elastic constants of nanometric films [4449-16]
Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]
AFM tip calibration using nanometer-sized structures induced by ion beam sputtering [4449-28]
Microroughness analysis of thin film components for VUV applications [4099-13]
Investigations of transmittance and reflectance in the DUV/VUV spectral range [4099-36]
X-ray investigations of a near surface layer of metal samples [4099-33]
Optical testing of long cylindrical lenses by means of scanning deflectometry [4099-17]
Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]
Lithography: a look at what is ahead (Invited Paper) [4099-01]
Fast-scanning ellipsometry for thin film characterization [4099-39]
Numerical investigation of the resolution in solid immersion lens systems [4099-28]
Present and future interference microscope systems for magnetic head metrology [4099-21]
Measurement of steep aspheres: a step forward to nanometer accuracy [4449-25]
IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]
Characteristics of tantalum oxynitride films prepared by rf magnetron sputtering [4099-30]
Standardization in optics characterization (Invited Paper) [4099-14]
Measurement of absorptance of optical coatings for F~2 lithography [4449-02]
Stitching interferometry of aspherical surfaces [4449-34]
Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]
Microstructure of thin films: correlation with laser damage threshold [4449-35]
Use of light scatter signals to identify particle material (Invited Paper) [4449-17]
Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]
Diffractive solid immersion lenses: characterization and manufacturing [4449-29]