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    Title :

    Diffractive solid immersion lenses: characterization and manufacturing [4449-29]


    Contributors:

    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4449

    DataCite | 1930


    IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]

    Boher, P. / Bucchia, M. / Piel, J. P. et al. | British Library Conference Proceedings | 2001


    Solid Immersion Lenses in Planar Waveguides

    Chien, D.-H. / Tsai, C.-H. / Lo, S.-S. et al. | British Library Online Contents | 2005


    Diffractive Lenses Create New Opportunities

    Faklis, D. | British Library Online Contents | 1995