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    Title :

    Effects of particle shape on particle identification and scatter predictions [4449-18]



    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    7 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001


    Nr. 4449

    DataCite | 1930


    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001


    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]

    Saito, T. / Saito, J. / Nakamura, E. et al. | British Library Conference Proceedings | 2001