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    Title :

    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]



    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001


    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001


    Nr. 4449

    DataCite | 1930


    Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]

    Johs, B. D. / Hale, J. / Ianno, N. J. et al. | British Library Conference Proceedings | 2001


    Interferometric metrology of wafer nanotopography for advanced CMOS process integration (Invited Paper) [4449-21]

    Valley, J. F. / Koliopoulos, C. L. / Tang, S. et al. | British Library Conference Proceedings | 2001