Use of light scatter signals to identify particle material (Invited Paper) [4449-17]
Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA
2001-01-01
9 pages
Aufsatz (Konferenz)
Englisch
© Metadata Copyright the British Library Board and other contributors. All rights reserved.
Effects of particle shape on particle identification and scatter predictions [4449-18]
British Library Conference Proceedings | 2001
|Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]
British Library Conference Proceedings | 2001
|DataCite | 1930
Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]
British Library Conference Proceedings | 2001
|Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]
British Library Conference Proceedings | 2001
|