Effects of particle shape on particle identification and scatter predictions [4449-18]
Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA
2001-01-01
7 pages
Aufsatz (Konferenz)
Englisch
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Use of light scatter signals to identify particle material (Invited Paper) [4449-17]
British Library Conference Proceedings | 2001
|DataCite | 1930
Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]
British Library Conference Proceedings | 2001
|Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]
British Library Conference Proceedings | 2001
|British Library Conference Proceedings | 2001
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