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    Titel :

    Measurement of total integrated scatter of optical coatings for 157-nm lithography [4449-04]


    Beteiligte:
    Saito, T. (Autor:in) / Saito, J. (Autor:in) / Nakamura, E. (Autor:in) / Kudo, T. (Autor:in) / Kagaya, M. (Autor:in) / Takahashi, T. (Autor:in) / Duparre, A. / Singh, B. / SPIE

    Kongress:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Erscheinungsdatum :

    2001-01-01


    Format / Umfang :

    8 pages




    Medientyp :

    Aufsatz (Konferenz)


    Format :

    Print


    Sprache :

    Englisch




    Measurement of absorptance of optical coatings for F~2 lithography [4449-02]

    Ouchi, C. / Hasegawa, M. / Matsumoto, A. et al. | British Library Conference Proceedings | 2001


    Nr. 4449

    DataCite | 1930


    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001


    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001


    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001