Recent developments in spectroscopic ellipsometry for in-situ applications (Invited Paper) [4449-07]
Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA
2001-01-01
17 pages
Aufsatz (Konferenz)
Englisch
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IR spectroscopic ellipsometry for industrial characterization of semiconductors [4449-09]
British Library Conference Proceedings | 2001
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Use of light scatter signals to identify particle material (Invited Paper) [4449-17]
British Library Conference Proceedings | 2001
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