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    Title :

    Evaluating optical and supersmooth surface using AFM in optical manufacturing technology [4099-07]


    Contributors:
    Li, J. (author) / Xiao, S. (author) / Li, X. (author) / Ying, A. (author) / Zhao, A. (author) / Al-Jumaily, G. A. / SPIE

    Conference:

    Conference, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2000 ; San Diego, CA



    Publication date :

    2000-01-01


    Size :

    6 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Nr. 4099

    DataCite | 1924


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