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    Title :

    Measuring the scatter distribution of PSL spheres on Si wafers using a fast calibrated CMOS photodetector array [4449-20]


    Contributors:

    Conference:

    Conference; 2nd, Optical metrology roadmap for the semiconductor, optical, and data storage industries ; 2001 ; San Diego, CA



    Publication date :

    2001-01-01


    Size :

    9 pages




    Type of media :

    Conference paper


    Type of material :

    Print


    Language :

    English




    Accurate sizing of deposited PSL spheres from light scatter measurements [4449-19]

    Stover, J. C. / Scheer, C. A. / SPIE | British Library Conference Proceedings | 2001


    Polarized light scattering from metallic particles on silicon wafers [4449-39]

    Kim, J. H. / Ehrman, S. H. / Mulholland, G. W. et al. | British Library Conference Proceedings | 2001


    Effects of particle shape on particle identification and scatter predictions [4449-18]

    Ivakhnenko, V. I. / Stover, J. C. / Scheer, C. A. et al. | British Library Conference Proceedings | 2001


    Nr. 4449

    DataCite | 1930


    Use of light scatter signals to identify particle material (Invited Paper) [4449-17]

    Stover, J. C. / Ivakhnenko, V. I. / Eremin, Y. A. et al. | British Library Conference Proceedings | 2001