Report describes one-year research effort in VLSL fabrication. Four activities are described: theoretical study of two-dimensional diffusion in SOS (silicon-on-sapphire); setup of sputtering system, furnaces, and photolithography equipment; experiments on double layer metal; and investigation of two-dimensional modeling of MOSFET's (metal-oxide-semiconductor field-effect transistors).
Progress in MOSFET double-layer metalization
NASA Tech Briefs ; 5 , 2
1980-09-01
Miscellaneous
No indication
English
Tests on Double Layer Metalization
| NTRS | 1983
| NTRS | 1980
Multilayer metalization of MOS IC's
| NTRS | 1980
Metalization Patterns by Thermal Decomposition
| NTRS | 1986
Design of solenoidal electromagnetic microactuator utilizing 3D X-ray lithography and metalization
| British Library Online Contents | 2007