Report discusses subsystems that will constitute fully-automated photolithography facility for IC's. Facility being developed at Marshall Space Flight Center will produce ultrareliable IC's with minimal human intervention.


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    Title :

    An automated photolithography facility for IC's


    Contributors:

    Published in:

    Publication date :

    1980-08-01



    Type of media :

    Miscellaneous


    Type of material :

    No indication


    Language :

    English





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