We present a differential phase detection scheme which incorporates a common-path optical heterodyne interferometer to measure the ellipsometric parameters in near real time.


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    Title :

    Interferometric differential phase ellipsometer


    Contributors:


    Publication date :

    2003-01-01


    Size :

    60570 byte




    Type of media :

    Conference paper


    Type of material :

    Electronic Resource


    Language :

    English



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